| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive sensor capable of more accurately measuring a capacitance while suppressing adherence of a movable body to a fixed plate.SOLUTION: A capacitive sensor 1 provided with a semiconductor substrate 4 is formed by bonding a first fixed plate 2 to one surface 4a of the semiconductor substrate 4 and bonding a second fixed plate 3 to the other surface 4b of the semiconductor substrate 4. Movable bodies 5 and 6 are formed so as to be rockable on the semiconductor substrate 4, and when rocking, the movable bodies 5 and 6 are abutted on the side of the second fixed plate 3 before being abutted on the side of the first fixed plate 2. Portions of contact with the movable bodies 5 and 6 on the side of the second fixed plate 3 have approximately the same potential as the movable bodies 5 and 6. |
