| 摘要 |
PROBLEM TO BE SOLVED: To provide an avalanche testing apparatus capable of avoiding an inaccurate measurement result by eliminating the influence of parasitic capacitance of a wafer mounting table which can be considered as a large capacitor.SOLUTION: An avalanche testing apparatus 20 comprises a wafer mounting table 41 configured to mount a wafer 21 thereon. The wafer 21 comprises a plurality of transistors 23. The wafer mounting table 41 comprises an insulating body 43 and a plurality of conductors 47. The plurality of conductors 47 are embedded in the insulating body 43. |
