发明名称 NONVOLATILE MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A nonvolatile memory device includes a first film layer formed on a substrate, and a second film layer formed on the first film layer. The second film layer comprises a first oxide material having a first oxygen content, and a second oxide material disposed laterally of the first oxide material and having a second oxygen content that is greater than the first oxygen content. The memory device also includes a third film layer formed on the second film layer, and the third film layer is disposed on the first oxide material and exposes portions of the second oxide material.
申请公布号 US2013240822(A1) 申请公布日期 2013.09.19
申请号 US201213607464 申请日期 2012.09.07
申请人 WADA JUNICHI;KABUSHIKI KAISHA TOSHIBA 发明人 WADA JUNICHI
分类号 H01L45/00 主分类号 H01L45/00
代理机构 代理人
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