发明名称 Suppression Of Parasitic Optical Feedback In Pulse Laser Systems
摘要 A pulsed laser system includes a variable attenuator located in a secondary optical path bounded by a target surface and one or more reflective surfaces outside of the primary laser oscillator of the laser system. The variable attenuator isolates an output optical amplifier of the laser system from light reflected from the target during time periods between laser pulses. In some embodiments, the variable attenuator is synchronously controlled with the primary laser oscillator. In some other embodiments, the variable attenuator is controlled separately from the primary laser oscillator to shape the generated laser pulses.
申请公布号 US2013242380(A1) 申请公布日期 2013.09.19
申请号 US201313789870 申请日期 2013.03.08
申请人 KLA-TENCOR CORPORATION 发明人 TSIGUTKIN KONSTANTIN
分类号 H01S3/10 主分类号 H01S3/10
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