发明名称 |
SYSTEM FOR MACHINING SEED RODS FOR USE IN A CHEMICAL VAPOR DEPOSITION POLYSILICON REACTOR |
摘要 |
A method for machining a profile into a silicon seed rod using a machine. The silicon seed rod is capable of being used in a chemical vapor deposition polysilicon reactor. The machine includes a plurality of grinding wheels. The method includes grinding a v-shaped profile into a first end of the silicon seed rod with one of the plurality of grinding wheels and grinding a conical profile in a second end of the silicon seed rod with another of the plurality of grinding wheels. |
申请公布号 |
WO2013135631(A1) |
申请公布日期 |
2013.09.19 |
申请号 |
WO2013EP54881 |
申请日期 |
2013.03.11 |
申请人 |
MEMC ELECTRONIC MATERIALS S.P.A. |
发明人 |
BOVO, RODOLFO;MOLINO, PAOLO |
分类号 |
B24B49/12;B24B7/16;B24B19/00 |
主分类号 |
B24B49/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|