发明名称
摘要 In the zinc oxide film forming apparatus (1), the deposit containing zinc oxide is formed on the conductive layer of the resin substrate (9) by electrodeposition in the deposition part (2), and the resin substrate (9) is carried to the applying part (4). Subsequently, the film forming material which is in liquid or paste form and contains particles of zinc oxide and solvent is applied onto the conductive layer, and then the solvent is removed from the film forming material on the conductive layer by volatilization. It is therefore possible to easily and efficiently form the porous zinc oxide film which has superior adhesion to the conductive layer of the resin substrate (9).
申请公布号 JP5295751(B2) 申请公布日期 2013.09.18
申请号 JP20080329755 申请日期 2008.12.25
申请人 发明人
分类号 H01M14/00;H01L21/208;H01L21/365;H01L31/04 主分类号 H01M14/00
代理机构 代理人
主权项
地址