| 摘要 |
<p>The device has a micromechanical component (32-3) in contact with another micromechanical component (34-3) such that a sliding relative movement occurs between contact surfaces (36-3) of the components. The former component is formed from hard, dimensionally stable non-metallic material e.g. silicon, diamond, diamond-like carbon, synthetic ruby or sapphire, so that one of the contact surfaces includes longitudinal dimension of maximum 200 micrometers perpendicular to a relative movement direction and extends in the relative movement direction.</p> |
