White-light interferometric measuring device

摘要

A white-light interferometric measuring device (100) includes: a white light source (106) that emits a white light beam (108); a beam splitter (116) that reflects the white light beam (108); and an interference objective lens (120) that collects the white light beam (108) having reflected off the beam splitter (116) in the direction of an optical axis (0) and irradiates a measurement workpiece (102) with the white light beam (108), the interference objective lens (120) generating interference between a measurement light beam obtained by reflection of the white light beam (108) off the measurement workpiece (102) and a reference light beam obtained by branching of the white light beam (108) to be converged on the measurement workpiece (102). Polarization correcting means (112) that corrects the white light beam (108) to enter the interference objective lens (120) to circularly polarized light is arranged between the white light source (106) and the interference objective lens (120).