| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample detecting device capable of easily and optically detecting a sample with high accuracy without requiring an optical autofocusing operation, and to provide a sample analyzing device including the sample detecting device. SOLUTION: The sample detecting device for optically detecting a sample on a substrate comprises: an optical system 34 to 40 irradiating the substrate 33 with light; and tilting means for focusing light on the substrate by separately moving three points on the substrate 33 out of the region for detecting the sample, in a direction along the optical axis or a tilt direction with respect to the direction of the optical axis as a reference line, based on preliminarily acquired information relating to the substrate 33. COPYRIGHT: (C)2012,JPO&INPIT
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