| 摘要 |
In a hole examining device, an examination head (105) is supported to be movable in an X direction and a Y direction which are orthogonal to each other, measurement heads (125, 126) are supported to be movable in a Z direction which is orthogonal to the X direction and the Y direction with respect to the examination head (105), and a plurality of first measurers (127) and a plurality of second measurers (128) are arranged in the measurement heads (125, 126) in parallel and may be held at an advance position which advances as well as retreats with respect to the Z direction, thereby improving workability of an examining operation. |
