| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid processing device including a plurality of liquid processing parts having substrate holding parts arranged in a lateral direction in a straight line and a processing liquid nozzle shared by the liquid processing parts which can prevent processing liquid from dripping from the processing liquid nozzle onto the substrate in order to restrain yield reduction. SOLUTION: A liquid removal part for removing the drops from the processing liquid nozzle is provided in the lower part of a movement path of a processing liquid nozzle between openings of a plurality of cup bodies arranged in a lateral direction in a straight line so as to contact drops of the processing liquid dripping from the processing liquid nozzle moved by movement means. Therefore, when the processing liquid nozzle moves between a waiting part and each liquid processing part in order to process a substrate, the dripping of the drops from the processing liquid nozzle onto the substrate can be prevented. As a result, yield reduction can be restrained. COPYRIGHT: (C)2012,JPO&INPIT |
