发明名称
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a device of inspecting a disc substrate that can accurately inspect the condition of a film or a defective section or the like on the surface of a disc substrate on the basis of a photograph image. <P>SOLUTION: The inspecting device includes: an RGB image data generation means (S1) that generates a red component image data, a green component image data and a blue component image data showing a photograph image in an RGB space, from a red image signal, a green image signal, and a blue image signal sequentially output from an image pickup section; and a color attribute image data generation means (S2) that generates either of a saturation component image data showing the photograph image on the basis of saturation from the red, green and blue component image data and a hue component image data showing the photograph image on the basis of hue. The photograph image is analyzed (S3 and S4) on the basis of either of the saturation component image data and the hue component image data. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT</p>
申请公布号 JP5294445(B2) 申请公布日期 2013.09.18
申请号 JP20070275836 申请日期 2007.10.23
申请人 发明人
分类号 H01L21/66;H04N9/64 主分类号 H01L21/66
代理机构 代理人
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