发明名称 PROCESS FOR PRODUCING INDIUM OXIDE-CONTAINING LAYERS
摘要 The present invention relates to a liquid phase process for producing indium oxide-containing layers, in which a coating composition preparable from a mixture comprising at least one indium oxide precursor and at least one solvent and/or dispersion medium, in the sequence of points a) to d), a) is applied to a substrate, and b) the composition applied to the substrate is irradiated with electromagnetic radiation, c) optionally dried and d) converted thermally into an indium oxide-containing layer, where the indium oxide precursor is an indium halogen alkoxide of the generic formula InX(OR)2 where R is an alkyl radical and/or alkoxyalkyl radical and X is F, Cl, Br or I and the irradiation is carried out with electromagnetic radiation having significant fractions of radiation in the range of 170-210 nm and of 250-258 nm, to the indium oxide-containing layers producible with the process, and the use thereof.
申请公布号 EP2638183(A1) 申请公布日期 2013.09.18
申请号 EP20110779137 申请日期 2011.10.26
申请人 EVONIK DEGUSSA GMBH 发明人 STEIGER, JUERGEN;PHAM, DUY VU;THIEM, HEIKO;MERKULOV, ALEXEY;HOPPE, ARNE
分类号 C23C18/12 主分类号 C23C18/12
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