| 摘要 |
<p>The invention relates to a movement sensor comprising a plurality of plate-type layers on which individual sensors are arranged and which are embodied in such a way that: the sensor comprises a top plate (2) and a bottom plate (3); the sensor comprises corner points in which connection contacts (8, 8a) are arranged; the top plate (2) and the bottom plate (3) each have a sensor surface (14, 15) connected to the connection contacts (8, 8c) by means of strip conductors (9, 9c); at least one chamber plate (3) comprising a recess is arranged between the cover plate (2) and the bottom plate (4); said chamber plate (3) comprises corner points in which connection contacts (8a, 8b) are arranged; the sensor surfaces (14, 15) of the top plate (2) and the bottom plate (4) are fitted above the recess of the chamber plate (3), such that a closed cavity (5) is produced, that has inner surfaces (7) to which connection contacts (8a, 8b) arranged in the corner points thereof are electroconductively connected by means of strip conductors (9a, 9b); an electroconductive ball (6) is arranged in the cavity (5); the connection contacts (8, 8a, 8b, 8c) are embodied as contact columns guided through all of the plate-type layers (2, 3, 4); the cover plate (4) has a strip conductor (9) embodied in such a way that it is connected to the connection surface of the bottom plate (4) by means of the contact columns (8), without creating an electrical connection to the contact surface (14) of the bottom plate; and the top plate, bottom plate and inner surfaces (7) of the cavity (5) of the chamber plate are electrically isolated from each other, preferably by a thin insulating layer (10, 16).</p> |
