发明名称 |
Magnetic sensor manufacturing |
摘要 |
A magnetic sensor comprising a first shield and a second shield and a sensor stack between the first and the second shield, the sensor stack having a plurality of layers wherein at least one layer is annealed using in-situ rapid thermal annealing. In one implementation of the magnetic sensor a seed layer is annealed using in-situ rapid thermal annealing. Alternatively, one of a barrier layer, an AFM layer, and a cap layer is annealed using in-situ rapid thermal annealing. |
申请公布号 |
EP2639593(A1) |
申请公布日期 |
2013.09.18 |
申请号 |
EP20130159039 |
申请日期 |
2013.03.13 |
申请人 |
SEAGATE TECHNOLOGY LLC |
发明人 |
HE, QING;JUNG, WONJOON;COVINGTON, MARK WILLIAM;KIEF, MARK THOMAS;CHEN, YONGHUA |
分类号 |
G01R33/00;G01R33/09 |
主分类号 |
G01R33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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