Immersion exposure apparatus and exposure method,申请号EP20070121119-传众专利搜索

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发明名称	Immersion exposure apparatus and exposure method
摘要
申请公布号	EP1923744(B1)	申请公布日期	2013.09.18
申请号	EP20070121119	申请日期	2007.11.20
申请人	CANON KABUSHIKI KAISHA	发明人	EMOTO, KEIJI
分类号	G03F7/20;G03F9/00	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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