发明名称 EXCIMER LAMP
摘要 The present invention provides a quasi-molecule lamp which can restrain the reduction degree of the reflective index of the ultraviolet reflecting film even if the lamp is lighting for a long time to be smaller, will not generate peeling of the ultraviolet reflecting film, thereby can efficiently emit vacuum ultraviolet light. The inventive quasi-molecule lamp includes a discharge container composed of silica glass which is provided with discharge space; a pair of electrodes provided in a state of clipping the silica glass forming the discharge container. So that the quasi-molecule discharging is generated in the discharge space of the discharge container, wherein, the discharge container is exposed on the surface of the discharge space, to form a ultraviolet reflectance coating formed by the silicon oxide particles and aluminium oxide particles, when the pipe wall load is set to be b[W/cm<2>], the ultraviolet reflecting film has aluminium oxide particles with the ratio range from (10b-4)wt% to 70wt% at the surface layer part exposed in the discharge space.
申请公布号 KR101308780(B1) 申请公布日期 2013.09.17
申请号 KR20080080906 申请日期 2008.08.19
申请人 发明人
分类号 H01J61/35;H01J65/00 主分类号 H01J61/35
代理机构 代理人
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