| 摘要 |
PURPOSE: An aerosol supply device is provided to be able to be replaced by a gas line connect part, and to induce sufficient flow of powder, thereby easily form an aerosol of uniform concentration. CONSTITUTION: An aerosol supply device comprises an aerosol line(10) and a gas supply line(20), an aerosol chamber(30) of which upper side connects to the aerosol line, and lower side connects to the gas supply line, and a porous gas line connection part(50) for preventing drop of powder to the gas supply line, connecting the lower part of the aerosol chamber and the gas supply line. The aerosol chamber becomes narrower toward the lower side in order to form uniform aerosol by constantly settling powder in the lower part. |
