发明名称 Self aligned silicide device fabrication
摘要 A method for fabricating a device includes forming a silicide layer on a substrate, forming a conductive layer over exposed portions of the substrate and the silicide layer, patterning and removing exposed portions of the conductive layer and the silicide layer with a first process, and patterning and removing exposed portions of the conductive layer with a second process.
申请公布号 US8536014(B2) 申请公布日期 2013.09.17
申请号 US201113306494 申请日期 2011.11.29
申请人 SPECK ROBERT K.;TULL KENNETH B.;MILLER MARJORIE L.;GM GLOBAL TECHNOLOGY OPERATIONS LLC 发明人 SPECK ROBERT K.;TULL KENNETH B.;MILLER MARJORIE L.
分类号 H01L21/20 主分类号 H01L21/20
代理机构 代理人
主权项
地址