发明名称 |
SEMICONDUCTOR MATERIAL SAWING DEVICE |
摘要 |
PURPOSE: A semiconductor material sawing device is provided to easily perform a cutting process by adding a simple conversion unit even if a semiconductor material supply device is changed. CONSTITUTION: A pickup part (200) includes at least one pickup part. A transfer part (300) transfers the pickup part in a predetermined direction. A material supply part includes at least one material accommodating groove. The material supply part includes at least one feeder. A sawing part (500) includes at least one chuck table and at least one sawing unit. |
申请公布号 |
KR20130102423(A) |
申请公布日期 |
2013.09.17 |
申请号 |
KR20120023647 |
申请日期 |
2012.03.07 |
申请人 |
HANMISEMICONDUCTOR CO., LTD. |
发明人 |
LEE, YONG KOO |
分类号 |
H01L21/78 |
主分类号 |
H01L21/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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