发明名称 SEMICONDUCTOR MATERIAL SAWING DEVICE
摘要 PURPOSE: A semiconductor material sawing device is provided to easily perform a cutting process by adding a simple conversion unit even if a semiconductor material supply device is changed. CONSTITUTION: A pickup part (200) includes at least one pickup part. A transfer part (300) transfers the pickup part in a predetermined direction. A material supply part includes at least one material accommodating groove. The material supply part includes at least one feeder. A sawing part (500) includes at least one chuck table and at least one sawing unit.
申请公布号 KR20130102423(A) 申请公布日期 2013.09.17
申请号 KR20120023647 申请日期 2012.03.07
申请人 HANMISEMICONDUCTOR CO., LTD. 发明人 LEE, YONG KOO
分类号 H01L21/78 主分类号 H01L21/78
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