发明名称 |
Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus |
摘要 |
A carrier for supporting a substrate during processing by a meniscus fowled by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening. The opening is slightly larger than the substrate such that a gap exists between the substrate and the opening. Means for reducing a size and frequency of entrance and/or exit marks on substrates is provided, the means aiding and encouraging liquid from the meniscus to evacuate the gap. A method for reducing the size and frequency of entrance and exit marks is also provided.
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申请公布号 |
US8534303(B2) |
申请公布日期 |
2013.09.17 |
申请号 |
US201113324295 |
申请日期 |
2011.12.13 |
申请人 |
O'DONNELL ROBERT;LENZ ERIC;WILCOXSON MARK;RAVKIN MIKE;YATSKAR ALEXANDER A.;LAM RESEARCH CORPORATION |
发明人 |
O'DONNELL ROBERT;LENZ ERIC;WILCOXSON MARK;RAVKIN MIKE;YATSKAR ALEXANDER A. |
分类号 |
B08B11/02 |
主分类号 |
B08B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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