摘要 |
<p>Based on the operation principle of diffraction aberration correction for controlling the phase of the electron beam using the Aharonov-Bohm effect, a diffraction aberration corrector is formed by the structure of a corrector formed by the multipole of the solenoid coil ring and a function of adjusting the degree of orthogonality or axial shift of the vector potential with respect to the beam axis. In order to cause a phase difference, the diffraction aberration corrector that induces a vector potential, which is perpendicular to the beam axis and has a symmetrical distribution within the orthogonal plane with respect to the beam axis, is provided near the objective aperture and the objective lens. A diffracted wave traveling in a state of being inclined from the beam axis passes through the ring of the magnetic flux. Therefore, since the phase difference within the beam diameter is increased by the Aharonov-Bohm effect due to the vector potential, it is possible to suppress the intensity of the electron beam on the sample.</p> |