| 摘要 |
[Problem] To provide an induction heating device whereby it is possible to efficiently heat a member to be inductively heated while preventing the magnetic poles disposed on the exterior of a chamber from becoming heated. [Solution] An induction heating device (10) provided with: a chamber (12) constituting a process chamber; magnetic poles (32, 34) disposed on the outer circumference of the chamber (12) in the vicinity of a magnetic permeable shielding plate (46) for shielding an opening (42) disposed on a housing (26) constituting the chamber (12); and induction heating coils (36, 38) wound around the magnetic poles (32, 34). The induction heating device (10) is characterized in that: a cooling plate (48) having a higher thermal conductivity than the magnetic permeable shielding plate (46) and a cooling pipe (50) through which a refrigerant for cooling the cooling plate (48) can pass are disposed between the magnetic permeable shielding plate (46) and the magnetic poles (32, 34); the cooling plate (48) is disposed in close contact with the magnetic permeable shielding plate (46) while the cooling pipe (50) is disposed in close contact with at least a portion of the cooling plate (48); and a space is formed between the cooling plate (48) and the magnetic poles (32, 34). |
