| 摘要 |
A MEMS device can include an actuator, a base formed from a substrate, and a plurality of memory cells integrated with the base. At least a portion of the base can be configured to move in response to the actuator. A miniature camera can include a base comprising a frame, a stage, and a plurality of flexures configured to connect the stage with the frame. The flexures can be adapted to bend to permit the stage to move relative to the frame. The camera can include a plurality of memory cells integrated with the base, a lens mount secured to the stage, a lens barrel secured to the lens mount, an image sensor, and an actuator adapted to move the stage relative to the frame and the image sensor.
|
