发明名称 |
A MICROWAVE PLASMA REACTOR FOR MANUFACTURING SYNTHETIC DIAMOND MATERIAL |
摘要 |
A microwave plasma reactor for manufacturing synthetic diamond material via chemical vapour deposition, the microwave plasma reactor comprising: a plasma chamber; a substrate holder disposed in the plasma chamber and comprising a supporting surface for supporting a substrate on which the synthetic diamond material is to be deposited in use; a microwave coupling configuration for feeding microwaves from a microwave generator into the plasma chamber; and a gas flow system for feeding process gases into the plasma chamber and removing them therefrom; wherein the microwave plasma reactor further comprises an electrically conductive plasma stabilizing annulus disposed around the substrate holder within the plasma chamber. |
申请公布号 |
KR20130102639(A) |
申请公布日期 |
2013.09.17 |
申请号 |
KR20137018631 |
申请日期 |
2011.12.14 |
申请人 |
ELEMENT SIX LIMITED |
发明人 |
SCARSBROOK GEOFFREY ALAN;WILMAN JONATHAN JAMES;DODSON JOSEPH MICHAEL;BRANDON JOHN ROBERT;COE STEVEN EDWARD;WORT CHRISTOPHER JOHN HOWARD |
分类号 |
H01J37/32;C23C16/27 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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