发明名称 |
Radiation-sensitive resin composition, method for forming a resist pattern, compound, and polymer |
摘要 |
A radiation-sensitive resin composition includes a first polymer that includes a repeating unit having an acid-labile group and becomes alkali-soluble upon dissociation of the acid-labile group, and a radiation-sensitive acid-generating agent. The acid-labile group has a structure shown by a general formula (1). R1 represents a methyl group or the like, R2 represents a hydrocarbon group that forms a cyclic structure, R3 represents a fluorine atom or the like, R4 represents a carbon atom, and n1 is an integer from 1 to 7.
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申请公布号 |
US8535871(B2) |
申请公布日期 |
2013.09.17 |
申请号 |
US201113325056 |
申请日期 |
2011.12.14 |
申请人 |
ASANO YUUSUKE;KAWAKAMI TAKANORI;JSR CORPORATION |
发明人 |
ASANO YUUSUKE;KAWAKAMI TAKANORI |
分类号 |
G03F7/039;G03F7/20;G03F7/30 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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