发明名称 Mirror actuator and beam irradiation device
摘要 A mirror actuator has a first pivot portion which is pivotally supported on a base member, and a second pivot portion which is pivotally supported on the first pivot portion. A mirror is disposed in the second pivot portion. A first coil is disposed in the first pivot portion, and a second coil is disposed in the second pivot portion. A first elastic member connects between the base member and the first pivot portion. A second elastic member connects between the first pivot portion and the second pivot portion. The first elastic member and the second elastic member are connected by a circuit pattern. With the provision of the first elastic member, the second elastic member and the circuit pattern, a current is supplied to the first coil and to the second coil.
申请公布号 US8537448(B2) 申请公布日期 2013.09.17
申请号 US201113334745 申请日期 2011.12.22
申请人 YAMADA MASATO;SANYO ELECTRIC CO., LTD. 发明人 YAMADA MASATO
分类号 G02B26/08 主分类号 G02B26/08
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