发明名称 Methods and materials for making a monolithic porous pad cast onto a rotatable base
摘要 The present invention includes methods and materials for making a brush or pad for removing materials, particles, or chemicals from a substrate. The brush or pad includes a rotatable base for supporting a porous pad material. The base include an inner surface and an outer surface and a plurality of channels in the base for interlocking the porous pad material with the base. A porous pad material covers at least a portion of the outer surface of the base and is used for removing material from various substrates. The porous pad material fills one or more of the channels in the base and interlocks the porous pad material with the base. Preferably the channels fluidly connect said inner surface with the outer surface of the base and aid in the alignment of porous pad nodes and the distribution of fluid within the porous pad.
申请公布号 US8533895(B2) 申请公布日期 2013.09.17
申请号 US201113190191 申请日期 2011.07.25
申请人 BENSON BRIANT ENOCH;ENTEGRIS, INC. 发明人 BENSON BRIANT ENOCH
分类号 B08B1/04;B24D3/32;B24D5/10;H01L21/304 主分类号 B08B1/04
代理机构 代理人
主权项
地址