发明名称 |
Imaging device and method for high-sensitivity optical scanning and integrated circuit therefor |
摘要 |
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
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申请公布号 |
US8536506(B2) |
申请公布日期 |
2013.09.17 |
申请号 |
US201213351542 |
申请日期 |
2012.01.17 |
申请人 |
KATZIR YIGAL;GUR-ARIE ITAY;MALINOVICH YACOV;ORBOTECH LTD. |
发明人 |
KATZIR YIGAL;GUR-ARIE ITAY;MALINOVICH YACOV |
分类号 |
H01L27/00;G01N21/88;G01N21/89;G01N21/956;G06T1/00;G06T1/60;H01L27/14;H01L27/146;H04N5/374 |
主分类号 |
H01L27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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