发明名称 |
Apparatus for providing a rotation carrier magazine, and method of operating thereof |
摘要 |
An apparatus for supporting a plurality of carriers or substrates is described. The apparatus includes a vacuum chamber and a rotatable support for supporting the plurality of carriers or substrates, wherein the support is provided within the vacuum chamber and is configured for rotating the supported plurality of carriers or substrates around a rotation axis.
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申请公布号 |
US8534976(B2) |
申请公布日期 |
2013.09.17 |
申请号 |
US20100914113 |
申请日期 |
2010.10.28 |
申请人 |
GERTMANN REINER;KOENIG MICHAEL;APPLIED MATERIALS INC. |
发明人 |
GERTMANN REINER;KOENIG MICHAEL |
分类号 |
B65G49/07 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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