发明名称 |
Gas line weldment design and process for CVD aluminum |
摘要 |
A system of gas lines for a processing chamber and a method of forming a gas line system for a processing chamber are provided. The system of gas lines includes electropolished multi-way valves that connect electropolished linear gas lines. By using multi-way valves rather than tee-fittings and electropolishing the linear gas lines, the nucleation of contaminating particles in the system of gas lines may be reduced.
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申请公布号 |
US8535443(B2) |
申请公布日期 |
2013.09.17 |
申请号 |
US20060459575 |
申请日期 |
2006.07.24 |
申请人 |
LEE WEI TI;GUO TED;CHIAO STEVE H.;RITCHIE ALAN A.;APPLIED MATERIALS, INC. |
发明人 |
LEE WEI TI;GUO TED;CHIAO STEVE H.;RITCHIE ALAN A. |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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地址 |
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