| 发明名称 |
APPARATUS FOR TRANSFERRING SUBSTRATES |
| 摘要 |
<p>PURPOSE: An apparatus for transferring a substrate is provided to implement stability by screw-jointing a driving connection part and a substrate transferring shaft. CONSTITUTION: A driving part (110) provides a driving force for transferring a substrate. A substrate transferring shaft (150) includes a shaft body. A driving connection part (120) is connected to one end of the substrate transferring shaft. The driving connection part delivers the driving force to the substrate transferring shaft. The driving connection part includes a driving connection part body and a locking part. [Reference numerals] (110) Driving part</p> |
| 申请公布号 |
KR101309927(B1) |
申请公布日期 |
2013.09.17 |
| 申请号 |
KR20120070833 |
申请日期 |
2012.06.29 |
| 申请人 |
HYDIS TECHNOLOGIES CO., LTD. |
发明人 |
PARK, YONG JONG |
| 分类号 |
H01L21/677;B65G39/10;B65G49/06;G02F1/13 |
主分类号 |
H01L21/677 |
| 代理机构 |
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