WAFER TRANSFERRING ROBOT

摘要

PURPOSE: A wafer transferring robot is provided to be formed on the upper part of a supporting member and separated from a housing, thereby independently installing driving parts. CONSTITUTION: A supporting member (110) has an inner space. A housing (130) is installed on the upper surface of the supporting member. An elevating device is installed in the supporting member. The elevating device elevates the housing. A first to a fourth driving part are independently driven.