| 摘要 |
An apparatus for collecting chemicals and a method for collecting chemicals using the same are provided to reduce a cost thereof by reducing the number of components for collecting used developer. A bath(100) is formed to perform a wet process for a substrate to be transferred along a substrate transferring direction. A plurality of collection units(210,220) are installed at a bottom surface of the bath in order to collect chemicals to be used in the wet process. A plurality of collection tanks(310,320) are formed to store chemicals of the collection unit. The collection units are installed along the substrate transferring direction. The collection tanks correspond to the collection units. A path is formed to connect the collection units to each other. |
