| 摘要 |
PURPOSE: A differential pressure sensor is provided to alleviate pressure and thermal stress applied to a joint inside a sensor chip when pressure is high and ambient temperature is changed, thereby preventing the separation of the joint inside the sensor chip. CONSTITUTION: A differential pressure sensor includes a sensor chip (11), a first pipe member (12), a second pipe member (13), and an elasticity maintaining member. The sensor chip includes a sensor diaphragm (11-1), a first stopper member (11-2), and a second stopper member (11-3). The sensor diaphragm outputs signals due to a pressure difference. The first pipe member is welded on one surface of the sensor chip and includes an inner impulse path (12a) inducing the measurement pressure to one surface of the sensor diaphragm. The second pipe member is welded on the other surface of the sensor chip and includes an inner impulse path (13a) inducing the measurement pressure to the other surface of the sensor diaphragm. The elasticity maintaining member applies an elastic force toward one surface of the sensor chip to the first pipe member and an elastic force toward the other surface of the sensor chip to the second pipe member, thereby interposing the sensor chip between the first and second pipe members. |
