MEASURING METHOD FOR INTERFACIAL ADHESION STRENGTH OF FILM

摘要

PURPOSE: A method for measuring the interfacial adhesion of a thin film is provided to separate the thin film from a substrate after forming pre-cracks on the substrate, thereby easily measuring the interfacial adhesion of the thin film. CONSTITUTION: A method for measuring the interfacial adhesion of a thin film (104) includes the following steps of: arranging an indenter (200) on a surface of a substrate opposite to a surface in which the thin film of a target object is formed; forming cracks (106) on the substrate by applying a first press-in load to the target object by the indenter; and separating the thin film from the substrate by applying a second press-in load to the other surface of the target object and measuring the interfacial adhesion of the thin film.