| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and instrument capable of measuring a surface shape while holding contact force in a constant state by adjusting the contact force between a sensor contact part and a measurement object in measurement of the surface shape of a minute object using a contact type displacement sensor or the like.SOLUTION: A measuring instrument 11 scans a surface of an object 22 to be measured while bringing a tip of a stylus 20 into contact with the surface, and acquires a surface shape of the object 22 to be measured by measuring displacement of the stylus 20 at that time. Then, the contact force between the stylus 20 and the object 22 to be measured during measurement is adjusted by a counterbalance, and the surface shape of the object 22 to be measured is accurately measured and evaluated while maintaining a state where the contact force is extremely reduced. |
