| 摘要 |
<p>The present invention suppresses copper corrosion due to oxygen in the air, even if treatment is performed using a liquid, such as pure water, not containing an anticorrosive, and furthermore, suppresses reattachment of particles to a substrate surface. While supplying a liquid (D) to the surface of a substrate (W), a gas (G) is supplied toward the surface of the substrate (W), such that a curtain (gas curtain) of the gas (G) is formed on the surface of the liquid (D) supplied to the surface of the substrate (W), said curtain shielding the liquid from oxygen in the atmosphere by covering the surface of the liquid.</p> |
