| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact dust sensor.SOLUTION: A dust sensor 1 includes a detection unit 2 and a circuit unit electrically connected to the detection unit 2. The detection unit 2 has an elastically deformable cantilever unit 7 which has a piezoresistive layer 10 formed thereon. The circuit unit measures changes in resistance in a resonance frequency range of the cantilever unit 7. |
