发明名称 |
METHOD AND APPARATUS FOR CALCULATING REFRACTIVE INDEX, MATERIAL FOR CALCULATING REFRACTIVE INDEX, AND TOMOGRAPHY APPARATUS |
摘要 |
Provided is a method of calculating a refractive index of at least a part of a specimen by using electromagnetic wave measurement, the method including: measuring a first scattered wave from a structure of the specimen; measuring a second scattered wave from a structure in which a material for calculating refractive index is disposed on a surface of the specimen; and comparing intensities at corresponding portions of the first scattered wave and the second scattered wave.
|
申请公布号 |
US2013235367(A1) |
申请公布日期 |
2013.09.12 |
申请号 |
US201313782225 |
申请日期 |
2013.03.01 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SEKIGUCHI RYOTA;KUBOTA OICHI |
分类号 |
G01N21/41 |
主分类号 |
G01N21/41 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|