| 摘要 |
<p>The present invention increases heating efficiency of a susceptor while preventing a temperature increase of a partition window. The present invention is provided with the following: a susceptor (112) that is made of a conductive material and that is arranged within a processing room (102), and that loads wafers; a magnetic flux formation unit that includes an induction coil (124) that forms an alternating current magnetic flux that inductively heats a susceptor by generating magnetic flux that enters the susceptor; a partition window (200) that is in between and separate the susceptor and the magnetic flux formation unit and that is comprised of an insulator that passes magnetic flux from the magnetic flux formation unit through to the susceptor side; and an infrared ray reflector (210) that is arranged between the partition window and the susceptor and that reflects infrared rays emitted from the inductively-heated susceptor. The infrared ray reflector is comprised of metal dividers (212) that divide the entire surface of the reflector into a plurality of regions and that are arrayed so as to electrically separate the regions.</p> |
