| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique advantageous in accurately detecting abnormality of drawing.SOLUTION: A drawing device 100 includes a blanker, a plate which has an aperture for passing a charged particle beam formed, and blocks or passes the charged particle beam having passed through the blanker, a detection section which is disposed on the plate so as to detect the charged particle beam, and an AD converter which is disposed on the plate and converts an analog signal output from the detection section into a digital signal. |
