| 摘要 |
PROBLEM TO BE SOLVED: To provide an etching method that allows safe and simple etching and improves etching rate.SOLUTION: A method of etching a solid material includes: (1-1) bringing a material containing an organic compound having at least one kind of N-F coupling and a solid material into contact with each other; and (1-2a) applying a voltage between the material containing the organic compound having the one kind of N-F coupling and the solid material; or (1-2b) connecting one of the material containing the organic compound having the one kind of N-F coupling and the solid material to ground. |
