发明名称 |
RADIATION SOURCE AND LITHOGRAPHIC APPARATUS |
摘要 |
The present invention provides a method of monitoring the operation of a radiation source fuel droplet stream generator comprising a fuel-containing capillary and a piezo-electric actuator (500). The method comprises analysing the resonance frequency spectrum of a system comprising the fuel-containing capillary and the piezo-electric actuator in particular to look for changes in the resonance frequencies of the acoustic system which may be indicative of a change in the properties of the system requiring investigation. |
申请公布号 |
WO2013131706(A1) |
申请公布日期 |
2013.09.12 |
申请号 |
WO2013EP52420 |
申请日期 |
2013.02.07 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
KEMPEN, ANTONIUS;DIJKSMAN, JOHAN;MESTROM, WILBERT |
分类号 |
G03F7/20;B01L3/02;B41J2/045;H05G2/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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