发明名称 SUSCEPTOR
摘要 <p>Provided is a susceptor that minimizes waste space on the outermost circumference thereof and maximizes the number of placed spotfaces by changing the spotface placement of an outermost-circumference spotface row placed on the outer circumference of multiple spotface rows placed in a close-packed, honeycomb pattern structure. A spotface positioned at each vertex of a second spotface row (A2) that is the outermost circumference of coaxial hexagonally-shaped spotface rows (A1, A2) in a honeycomb pattern structure effectively makes a point contact with each of two spotfaces configuring the outermost-circumference spotface row (A3), and said two spotfaces effectively make a point contact with each other. A number of spotfaces are placed between spotface (M(3)-C) and spotface (M(3)-B), which are in the outermost-circumference spotface row (A3), said number being the same as the number of spotfaces placed between vertex (B2) and vertex (B1), which are in spotface row (A2). A number of spotfaces are placed between spotface (M(3)-D) and spotface (M(3)-E), which are in the outermost-circumference spotface row (A3), said number being the same as the number of spotfaces placed between vertex (B2) and vertex (B3), which are in spotface row (A2).</p>
申请公布号 WO2013133204(A1) 申请公布日期 2013.09.12
申请号 WO2013JP55820 申请日期 2013.03.04
申请人 TOYO TANSO CO., LTD. 发明人 SASAKI, SEISYU
分类号 H01L21/683 主分类号 H01L21/683
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