| 摘要 |
PROBLEM TO BE SOLVED: To provide measurement technology of tetrafluoride methane for simplifying information processing.SOLUTION: Concentration of hexafluoride ethane is detected based on absorbance of center wavelength 9035±50 nm, and cancellation correction is performed to a portion equivalent to the hexafluoride ethane based on the absorbance of center wavelength 7850±50 nm. |
