CERAMIC SUBSTRATE, MAGNETIC HEAD SLIDER, HARD DISK DRIVE, AND METHOD FOR MANUFACTURING CERAMIC SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a ceramic substrate capable of suppressing chipping during a cutting time, and excellent in machinability, and to provide a magnetic head and a method for manufacturing a ceramic substrate.SOLUTION: A ceramic substrate is a ceramic substrate having a first main surface 10a and a second main surface 10b, and constituted of a ceramic material containing a ≥20 to ≤80 mass% metal carbide and alumina as main components. The ceramic substrate 10 contains a fine particle layer 12 having the average crystal particle size of a and a coarse particle layer 13 having the average crystal particle size of b, wherein the thickness t1 of the fine particle layer 12, the thickness T of the ceramic substrate 10, the average crystal particle size a and the average crystal particle size b satisfy following relations: 0.05T≤t1≤0.95T and 1.1≤b/a.