| 摘要 |
PROBLEM TO BE SOLVED: To enable a shape measurement method by a reversing method with measurement accuracy of a required order even though a curve of an object to be measured increases due to self-weight by area largeness.SOLUTION: Additional support is performed so as to push up at least one point (F4) different from support points F1 to F3 of three points of an object W to be measured, all of the support points F1 to F4 of the object W to be measured including the additional support point F4 are set to arrangement in which the same positions (parts) of the object W to be measured are supported even though the front and the back of the object W to be measured are reversed, the additional support point F4 supports the object W to be measured so as to be able to change a support load, and displacement magnitude measurement of the front and the back of the object W to be measured is performed on the basis of setting in which a support load of the object W to be measured at the respective support points F1 to F4 becomes the same by changing the support load even though the front and the back of the object W to be measured are reversed. |
