| 发明名称 |
HIGH FREQUENCY HEATING APPARATUS |
| 摘要 |
A high frequency heating apparatus which heats a substrate by applying high frequency waves. The high frequency heating apparatus includes a high frequency generator which generates high frequency to heat the substrate and a reflector which reflects the high frequency generated by the high frequency generator toward the substrate.
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| 申请公布号 |
US2013233847(A1) |
申请公布日期 |
2013.09.12 |
| 申请号 |
US201313786094 |
申请日期 |
2013.03.05 |
| 申请人 |
SAMSUNG CORNING PRECISION MATERIALS CO., LTD. |
发明人 |
LEE HOIKWAN;YOON KYUNGMIN;CHO SEO-YEONG;KWON YOON YOUNG;NAM JINSU;PARK KYUNGWOOK;CHOI JAEYOUNG |
| 分类号 |
H05B6/64 |
主分类号 |
H05B6/64 |
| 代理机构 |
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代理人 |
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