| 摘要 |
Disclosed is a substrate holder arrangement (10, 11) for a coating system (12), having a holder (1) which comprises at least one support zone (3) with a support surface (30) on which a substrate support (2) is arranged, which support further comprises at least one first and one second gas inlet (4, 5) in the support surface (30), the first gas inlet (4) having a smaller distance to the centre (M) of the support surface (30) than the second gas inlet (5), and the first and second gas inlets (4, 5) having mutually-independent gas feeds (40, 50) designed to feed gases of different thermal conductivity. A coating system comprising a substrate holder arrangement, and a method for performing a coating process are also disclosed. |
